Impacts of N 2 and NH 3 plasma surface treatments on high-performance LTPS-TFT with high-κ gate dielectric

Ming Wen Ma*, Tien-Sheng Chao, Tsung Yu Chiang, Woei Cherng Wu, Tan Fu Lei

*此作品的通信作者

研究成果: Article › 同行評審

11 引文 斯高帕斯（Scopus）

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Engineering & Materials Science

Chemical Compounds