Impacts of fluorine ion implantation with low-temperature solid-phase crystallized activation on high-κ LTPS-TFT

Ming Wang Ma*, Chih Yang Chen, Chun Jung Su, Woei Cherngm Wu, Yi Hong Wu, Tsung Yu Yang, kuo Hsing Kao, Tien-Sheng Chao, Tan Fu Lei

*此作品的通信作者

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds