Impacts of a buffer layer and Hi-wafers on the performance of strained-channel NMOSFETs with SiN capping layer

Tzu I. Tsai*, Yao Jen Lee, King Sheng Chen, Jeff Wang, Chia Chen Wan, Fu Kuo Hsueh, Horng-Chih Lin, Tien-Sheng Chao, Tiao Yuan Huang

*此作品的通信作者

研究成果: Conference contribution同行評審

指紋

深入研究「Impacts of a buffer layer and Hi-wafers on the performance of strained-channel NMOSFETs with SiN capping layer」主題。共同形成了獨特的指紋。