Impacts of a buffer layer and Hi-wafers on the performance of strained-channel NMOSFETs with SiN capping layer

Tzu I. Tsai*, Yao Jen Lee, King Sheng Chen, Jeff Wang, Chia Chen Wan, Fu Kuo Hsueh, Horng-Chih Lin, Tien-Sheng Chao, Tiao Yuan Huang

*此作品的通信作者

研究成果: Conference contribution同行評審

原文English
主出版物標題2007 International Semiconductor Device Research Symposium, ISDRS
DOIs
出版狀態Published - 1 12月 2007
事件2007 International Semiconductor Device Research Symposium, ISDRS - College Park, MD, United States
持續時間: 12 12月 200714 12月 2007

出版系列

名字2007 International Semiconductor Device Research Symposium, ISDRS

Conference

Conference2007 International Semiconductor Device Research Symposium, ISDRS
國家/地區United States
城市College Park, MD
期間12/12/0714/12/07

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