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Hybrid Quantum-Classical Machine Learning for Lithography Hotspot Detection
Yuan Fu Yang
, Min Sun
智能系統研究所
研究成果
:
Conference contribution
›
同行評審
4
引文 斯高帕斯（Scopus）
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Keyphrases
Classical Machine Learning
100%
Hybrid Quantum-classical
100%
Lithography Hotspot Detection
100%
Process Technology
33%
Computer Vision
33%
Machine Learning Algorithms
33%
Semiconductor Process
33%
Circuit-based
33%
Design for Manufacturing
33%
Increased Yield
33%
Hybrid Model
33%
Quantum System
33%
Variational
33%
Increased Productivity
33%
Machine Learning Models
33%
Expected Benefits
33%
Training Performance
33%
Printability
33%
Novel Machine
33%
Machine Learning Technology
33%
Quantum Machine Learning
33%
Parametrized Quantum Circuit
33%
Lithography Hotspot
33%
Future Roadmap
33%
Quantum Layer
33%
Computer Science
Machine Learning
100%
Learning System
100%
Machine Learning Algorithm
25%
Quantum Circuit
25%
Machine Learning Technology
25%
Expected Benefit
25%
Quantum Machine Learning
25%
Computer Vision
25%
Chemical Engineering
Learning System
100%
Lithography
100%
Material Science
Lithography
100%
Electronic Circuit
50%