Hot-Electron Induced Excess Carriers in MOSFET's

S. Tam, F. C. Hsu, P. K. Ko, Chen-Ming Hu, R. S. Muller

研究成果: Article同行評審

22 引文 斯高帕斯(Scopus)

摘要

The existence of minority carriers in the substrate of n-channel MOSFET's operating in the saturation region is shown to be induced by turn-on of the source-substrate junction and photon generation. The two mechanisms are demonstrated experimentally and the photon-generation mechanism is further illustrated on a p-well CMOS wafer. Photon generation poses a constraint in VLSI dynamic RAM design.

原文English
頁(從 - 到)376-378
頁數3
期刊IEEE Electron Device Letters
3
發行號12
DOIs
出版狀態Published - 1 1月 1982

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