Hot Carrier Injection Reliability of Fabricated N- and P-Type Multi FinFETs with Different TiN Stacks

Yu Lin Chen*, Wen Kuan Yeh, Heng Tung Hsu, Ke Horng Chen, Wen Chin Lin, Tien Han Yu, Hung Ting Chou, D. Godwin Raj, D. Godfrey

*此作品的通信作者

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Engineering & Materials Science

Chemical Compounds