TY - GEN
T1 - History of micro-/nano-electronics development; breakthroughs and innovations
AU - Iwai, H.
N1 - Publisher Copyright:
© The Electrochemical Society
PY - 2021
Y1 - 2021
N2 - The first microprocessor was produced at the beginning of 1970's. At that time, the technology was 10 ~ 8 µm PMOS LSIs. This was the beginning of 'microelectronics'. Today, they have evolved to 10 nm-range CMOS LSIs, and we call it 'nano-electronics'. In the past 50 years, we have experienced 23 generations of the shrinkage, and the MOSFETs size has decreased by 1,000 times, resulting in an increase in integration density with 10 million times. The continuous increase in the integration with the constant rate is the Moore's law, but no one including myself could imagine its continuation for over 50 years. This paper describes the history of the development of Si MOS Integrated Circuits technology in the past 50 years based on my experience and results which had been obtained by the teamwork of my R & D groups at Toshiba and the collaboration with my colleagues.
AB - The first microprocessor was produced at the beginning of 1970's. At that time, the technology was 10 ~ 8 µm PMOS LSIs. This was the beginning of 'microelectronics'. Today, they have evolved to 10 nm-range CMOS LSIs, and we call it 'nano-electronics'. In the past 50 years, we have experienced 23 generations of the shrinkage, and the MOSFETs size has decreased by 1,000 times, resulting in an increase in integration density with 10 million times. The continuous increase in the integration with the constant rate is the Moore's law, but no one including myself could imagine its continuation for over 50 years. This paper describes the history of the development of Si MOS Integrated Circuits technology in the past 50 years based on my experience and results which had been obtained by the teamwork of my R & D groups at Toshiba and the collaboration with my colleagues.
UR - http://www.scopus.com/inward/record.url?scp=85107195409&partnerID=8YFLogxK
U2 - 10.1149/10202.0063ecst
DO - 10.1149/10202.0063ecst
M3 - Conference contribution
AN - SCOPUS:85107195409
T3 - ECS Transactions
SP - 63
EP - 112
BT - 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11
A2 - Jagannathan, H.
A2 - Timans, P.
A2 - Kakushima, K.
A2 - Gusev, E. P.
A2 - Karim, Z.
A2 - Misra, D.
A2 - Obeng, Y.
A2 - De Gendt, S.
A2 - Roozeboom, F.
PB - IOP Publishing Ltd.
T2 - 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021
Y2 - 30 May 2021 through 3 June 2021
ER -