HiPIMS-grown AlN buffer for threading dislocation reduction in DC-magnetron sputtered GaN epifilm on sapphire substrate

Jui Che Chang, Eric Nestor Tseng, Yi Ling Lo, Sanjay Nayak, Daniel Lundin, Per O.Å. Persson, Ray Hua Horng, Lars Hultman, Jens Birch, Ching Lien Hsiao*

*此作品的通信作者

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

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Keyphrases

Material Science

Engineering

Chemical Engineering

Agricultural and Biological Sciences