摘要
In this letter, high-performance and reliable wrapped select gate (WSG) polysilicon-oxide-nitride-oxide-silicon (SONOS) memory cells with multilevel and 2-bit/cell operation have been successfully demonstrated. The multilevel storage is easily obtained with fast program/erase speed (10 μs/5 ms) and low programming current (3.5 μA) for our WSG SONOS by a source-side injection. Besides the excellent reliability properties of our multilevel WSG-SONOS memory including unconsidered gate and drain disturbance, long charge retention (> 150 °C) and good endurance (> 104) are also presented. This novel WSG-SONOS memory with a multilevel and 2-bit/cell operation can be used in future high-density and high-performance memory application.
原文 | English |
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頁(從 - 到) | 214-216 |
頁數 | 3 |
期刊 | IEEE Electron Device Letters |
卷 | 28 |
發行號 | 3 |
DOIs | |
出版狀態 | Published - 7 3月 2007 |