High transmittance silicon terahertz polarizer using wafer bonding technology

Keyphrases

• High Transmittance 100%
• Antireflection Layer 100%
• Wafer Bonding Technology 100%
• Terahertz Polarizer 100%
• Polarizer 66%
• Central Frequency 66%
• Terahertz 66%
• Sn Solder 66%
• Deep Reactive Ion Etching 66%
• Robust Structure 66%
• Wire Grid Polarizer 66%
• Wafer 33%
• Low Temperature 33%
• Wafer Level 33%
• Refractive Index 33%
• Transmittance 33%
• Cost Reduction 33%
• Silicon Wafer 33%
• Grating 33%
• Humidity 33%
• Corrosion 33%
• Cu Wire 33%
• Effective Refractive Index 33%
• Optical Components 33%
• Extinction Ratio 33%
• Metal Bond 33%
• Square Root 33%
• Guard Ring 33%
• Fresnel Reflection Loss 33%
• Terahertz Time-domain Spectroscopy (THz-TDS) 33%
• Optical Alignment 33%
• Terahertz Systems 33%
• Eutectic Melting 33%
• Wire Grating 33%
• Empty Hole 33%

Engineering

• Terahertz 100%
• Bonding Technology 100%
• Wafer Bonding 100%
• Central Frequency 33%
• Deep Reactive Ion Etching 33%
• Low-Temperature 16%
• Time Domain 16%
• Refractive Index 16%
• Square Root 16%
• Silicon Wafer 16%
• Reflection Loss 16%
• Extinction Ratio 16%
• Effective Refractive Index 16%
• Eutectic Melting 16%
• Refractivity 16%
• Melting Point 16%

Material Science

• Polarizer 100%
• Silicon 100%
• Reactive Ion Etching 33%
• Refractive Index 33%
• Oxidation Reaction 16%
• Optical Device 16%
• Silicon Wafer 16%
• Corrosion 16%
• Surface (Surface Science) 16%