High thermal stability metal gate with tunable work function

Keyphrases

• Metal Gate 100%
• High Thermal Stability 100%
• Pt Alloys 100%
• Tunable Work Function 100%
• Nanoscale CMOS 33%
• Work Function 33%
• CMOS Devices 33%
• Thermally Stable 33%
• Gate Electrode 33%
• Self-aligned Process 33%
• Thermal Stress 33%
• MOS Structure 33%
• Gate Material 33%
• Oxygen Contamination 33%

Material Science

• Thermal Stability 100%
• Thermal Stress 100%