High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching

Keyphrases

• Femtosecond Laser 100%
• Chemical Etching 100%
• Laser-induced Periodic Surface Structures (LIPSS) 100%
• 4H-SiC 100%
• Quality Structure 100%
• High-spatial-frequency LIPSS 50%
• Transmission Electron Microscope 25%
• Energy Distribution 25%
• Etching Rate 25%
• Ablation 25%
• Amorphous SiC 25%
• Raman Spectra 25%
• Two-region 25%
• Surface Plasmon Polaritons 25%
• Laser-generated 25%
• Femtosecond Laser Ablation 25%
• Raman Intensity 25%
• Ablation Depth 25%
• Morphological Structure 25%
• Debris 25%
• 4H-SiC Surface 25%
• Laser Process 25%
• Oxidation Layer 25%
• High Spatial Frequency 25%
• Low Spatial Frequency 25%
• Periodic Structures 25%
• Ablation Zone 25%

Engineering

• Femtosecond Laser 100%
• Spatial Frequency 100%
• Induced Periodic Surface Structure 100%
• Energy Distribution 25%
• Etching Process 25%
• Femtosecond Laser Ablation 25%
• Sample Surface 25%
• Surface Plasmon 25%
• Raman Spectra 25%