High quality interpoly-oxynitride grown by NH3 nitridation and N2O RTA treatment

Tung Ming Pan, Tan Fu Lei, Wen Luh Yang, Chun Ming Cheng, Tien-Sheng Chao

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

指紋

深入研究「High quality interpoly-oxynitride grown by NH3 nitridation and N2O RTA treatment」主題。共同形成了獨特的指紋。

Keyphrases

Material Science