High quality interpoly dielectrics deposited on the nitrided-polysilicon for nonvolatile memory devices

Tien-Sheng Chao, Luh Yang Wen Luh Yang, C. M. Cheng, Ming Pan Tung Ming Pan, Fu Lei Tan Fu Lei

研究成果: Paper同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy