High-performance metal-ferroeletric-semiconductor nanosheet line tunneling field effect transistors with strained sige

Narasimhulu Thoti, Yiming Li*, Sekhar Reddy Kola, Seiji Samukawa

*此作品的通信作者

研究成果: Conference contribution同行評審

9 引文 斯高帕斯(Scopus)

摘要

Nanosheet line tunnel-field effect transistors (NLTFETs) are for the first time proposed by utilizing the advantages of ferroelectricity through HZO materials. Three ferroelectric line TFETs have been proposed and investigated. Among these, the metal-ferroelectric-semiconductor (MFS) structure has shown superior performance than the other two variants. The factors of electric field and electron barrier tunneling have been addressed to govern the performance of these structures. In addition, the effects of the ferroelectric (Hf0.5 Zr0.5 O2) thickness (tFE) and the dielectric constant have been discussed. The MFS NLTFETs can effectively utilize the advantages of ferroelectric than the other variants. High on-current of 175.6 μAμm and low off-current of 38.4 aA/ μm are achieved at tFE of 4 nm through proper utilization of gate-overlap on to the drain side. Furthermore, the proposed MFS structure successfully delivers low average and minimum subthreshold swings even at very thin tFE.

原文English
主出版物標題2020 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020
發行者Institute of Electrical and Electronics Engineers Inc.
頁面375-378
頁數4
ISBN(電子)9784863487635
DOIs
出版狀態Published - 23 9月 2020
事件2020 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020 - Virtual, Kobe, Japan
持續時間: 3 9月 20206 10月 2020

出版系列

名字International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
2020-September

Conference

Conference2020 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020
國家/地區Japan
城市Virtual, Kobe
期間3/09/206/10/20

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