High Mobility Oxide Complementary TFTs for System-on-Display and Three-Dimensional Brain-Mimicking IC

Albert Chin; Te Jui Yen; You Da Chen; Cheng Wei Shih; Vladimir Gritsenko

doi:10.1002/sdtp.14466

High Mobility Oxide Complementary TFTs for System-on-Display and Three-Dimensional Brain-Mimicking IC

Albert Chin, Te Jui Yen, You Da Chen, Cheng Wei Shih, Vladimir Gritsenko

研究成果: Conference article › 同行評審

3 引文斯高帕斯（Scopus）

摘要

One technology bottleneck for system-on-panel (SoP) is the lacking of high-performance p-type thin-film transistor (pTFT). Using high dielectric-constant (high-κ) gate materials with optimized processes, high hole and electron field-effect mobility of 7.6 and 345 cm²/Vs were measured in pTFT and nTFT, respectively. These high mobility devices on SiO₂ are the enabling technology for SoP and crucial for three-dimensional brain-mimicking integrated circuit (IC)-the technology trend for IC after reaching the quantum-mechanical limit soon.

原文	English
頁（從 - 到）	292-294
頁數	3
期刊	Digest of Technical Papers - SID International Symposium
卷	52
發行號	S1
DOIs	https://doi.org/10.1002/sdtp.14466
出版狀態	Published - 2月 2021
事件	International Conference on Display Technology, ICDT 2020 - Wuhan, China 持續時間: 18 10月 2020 → 21 10月 2020

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10.1002/sdtp.14466

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title = "High Mobility Oxide Complementary TFTs for System-on-Display and Three-Dimensional Brain-Mimicking IC",

abstract = "One technology bottleneck for system-on-panel (SoP) is the lacking of high-performance p-type thin-film transistor (pTFT). Using high dielectric-constant (high-κ) gate materials with optimized processes, high hole and electron field-effect mobility of 7.6 and 345 cm2/Vs were measured in pTFT and nTFT, respectively. These high mobility devices on SiO2 are the enabling technology for SoP and crucial for three-dimensional brain-mimicking integrated circuit (IC)-the technology trend for IC after reaching the quantum-mechanical limit soon.",

keywords = "Brain-mimicking integrated circuit, Complementary TFTs, High mobility, N-type TFT, P-type TFT, SnO pTFT, System-on-panel, ZnO nTFT",

author = "Albert Chin and Yen, {Te Jui} and Chen, {You Da} and Shih, {Cheng Wei} and Vladimir Gritsenko",

note = "Publisher Copyright: {\textcopyright} 2021, John Wiley and Sons Inc. All rights reserved.; International Conference on Display Technology, ICDT 2020 ; Conference date: 18-10-2020 Through 21-10-2020",

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AU - Chin, Albert

AU - Yen, Te Jui

AU - Chen, You Da

AU - Shih, Cheng Wei

AU - Gritsenko, Vladimir

PY - 2021/2

Y1 - 2021/2

N2 - One technology bottleneck for system-on-panel (SoP) is the lacking of high-performance p-type thin-film transistor (pTFT). Using high dielectric-constant (high-κ) gate materials with optimized processes, high hole and electron field-effect mobility of 7.6 and 345 cm2/Vs were measured in pTFT and nTFT, respectively. These high mobility devices on SiO2 are the enabling technology for SoP and crucial for three-dimensional brain-mimicking integrated circuit (IC)-the technology trend for IC after reaching the quantum-mechanical limit soon.

AB - One technology bottleneck for system-on-panel (SoP) is the lacking of high-performance p-type thin-film transistor (pTFT). Using high dielectric-constant (high-κ) gate materials with optimized processes, high hole and electron field-effect mobility of 7.6 and 345 cm2/Vs were measured in pTFT and nTFT, respectively. These high mobility devices on SiO2 are the enabling technology for SoP and crucial for three-dimensional brain-mimicking integrated circuit (IC)-the technology trend for IC after reaching the quantum-mechanical limit soon.

KW - Brain-mimicking integrated circuit

KW - Complementary TFTs

KW - High mobility

KW - N-type TFT

KW - P-type TFT

KW - SnO pTFT

KW - System-on-panel

KW - ZnO nTFT

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DO - 10.1002/sdtp.14466

M3 - Conference article

AN - SCOPUS:85114517156

SN - 0097-966X

VL - 52

SP - 292

EP - 294

JO - Digest of Technical Papers - SID International Symposium

JF - Digest of Technical Papers - SID International Symposium

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T2 - International Conference on Display Technology, ICDT 2020

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High Mobility Oxide Complementary TFTs for System-on-Display and Three-Dimensional Brain-Mimicking IC

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