Growth and fatigue properties of pulsed laser deposited Pb1-xLax(ZryTiz)O3 thin films with [00/] preferred orientation

W. J. Lin*, Tseung-Yuen Tseng, Y. Z. Wu, S. P. Lin, S. L. Tu, H. Chang, S. J. Yang, I. N. Lin


研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)


Growth of [00/] preferentially oriented Pb1-xLax(ZryTiz) O3 (PLZT) thin films was carried out by using targets of either tetragonal or rhombohedral structure. The tetragonal films grew in a similar manner to the rhombohedral films. Both the substrate temperature (500 or 550°C) and oxygen pressure (0.1 mbar, 10 Pa) required stringent control in order to deposit [00/]-textured PLZT thin films. The ferroelectric and fatigue properties were examined. The films deposited on YBa2Cu3O7-x and CeO2 coated silicon (YBCO/CeO2/Si) substrates possessed substantially lower remanent polarization than those grown on YBCO coated SrTiO3 (YBCO/STO) substrates; this is ascribed to inferior crystallinity of the PLZT/YBCO/CeO2/Si films. The remanent polarization of tetragonal PLZT films was degraded insignificantly up to 108 polarization switching cycles, whereas that of rhombohedral PLZT films was already reduced to 80% of the initial value after 108 cycles. Low endurance of rhombohedral films was ascribed to the periodic stress induced when the inclined spontaneous polarization vector (P=[111]) switched. On the other hand, high endurance of tetragonal films was explained by the fact that the spontaneous polarization vector (P=[001]) lies along the film's normal such that switch cycles cause no lateral stress.

頁(從 - 到)409-417
期刊Journal of Materials Science: Materials in Electronics
出版狀態Published - 十二月 1996


深入研究「Growth and fatigue properties of pulsed laser deposited Pb<sub>1-x</sub>La<sub>x</sub>(Zr<sub>y</sub>Ti<sub>z</sub>)O<sub>3</sub> thin films with [00/] preferred orientation」主題。共同形成了獨特的指紋。