Gettering of nickel within the Ni-metal induced lateral crystallization polycrystalline silicon film through the contact holes

Chen-Ming Hu*, Yew-Chuhg Wu

*此作品的通信作者

研究成果: Article › 同行評審

4 引文 斯高帕斯（Scopus）

指紋

深入研究「Gettering of nickel within the Ni-metal induced lateral crystallization polycrystalline silicon film through the contact holes」主題。共同形成了獨特的指紋。

Physics & Astronomy

Engineering & Materials Science