Ge Single-Crystal-Island (Ge-SCI) Technique and BEOL Ge FinFET Switch Arrays on Top of Si Circuits for Monolithic 3D Voltage Regulators

Hao Tung Chung, Bo Jheng Shih, Chih Chao Yang, Nei Chih Lin, Po Tsang Huang^*, Yun Ping Lan, Kuan Fu Lai, Wan Ting Hsu, Yu Ming Pan, Zhong Jie Hong, Han Wen Hu, Huang Chung Cheng, Chang Hong Shen, Jia Min Shieh, Fu Kuo Hsueh, Bo Yuan Chen, Da Chiang Chang, Wen-Kuan Yeh, Kuan Neng Chen, Chenming Hu