Gas sensing ability on polycrystalline-silicon nanowire

Yen Ren Lo, Huang-Ming Chen, Yuh-Shyong Yang, Ming Pei Lu

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

摘要

Trace of protic gases can alter the conductivity of the polycrystalline silicon nanowire (poly-Si NW) field effect transistor (FET). The aprotic gases have no effect on the electrical parameters. The proposed mechanism is due to the surface grain boundary of poly-Si NW. The direct evidence is obtained from the comparison between single- and poly-Si NW. The electrical parameters are varied according to the relative humidity levels. Nevertheless, the water molecules can be removed by vacuum indicating that it is physical absorption on the surface. As a result, the poly-Si NW FET has potential to be a reusable device for protic gas sensor.

原文English
頁(從 - 到)Q3104-Q3107
頁數4
期刊ECS Journal of Solid State Science and Technology
7
發行號7
DOIs
出版狀態Published - 13 4月 2018

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