Fuzzy macromodel for dynamic simulation of microelectromechanical systems

C. H. Ko*, Jin-Chern Chiou

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

This paper proposes an efficient approach to generate macromodels for simulating microelectromechanical systems using an experimental design and fuzzy logic model (FLM). Various approaches using force and energy macromodels to perform coupled simulations are proposed. Then, an experimental design is utilized to reduce the number of data needed for . macromodel identification, and an FLM is chosen for fitting the data. The identification scheme involves cluster estimation to determine the FLM structure, and backpropagation method to efficiently find the FLM structure parameters leading to accurate macromodels. The algorithm has been applied to a magnetic microactuator. Comparing with full meshed static coupled simulation shows force macromodel yielded errors of less than 1.5% for a 5μm displacement. And, the dynamic coupled simulation takes only several minutes. The results demonstrate the efficiency and effectiveness of the proposed approach.

原文English
主出版物標題Conference Proceedings - 2004 IEEE International Conference on Networking, Sensing and Control
頁面525-530
頁數6
DOIs
出版狀態Published - 28 6月 2004
事件Conference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control - Taipei, Taiwan
持續時間: 21 3月 200423 3月 2004

出版系列

名字Conference Proceeding - IEEE International Conference on Networking, Sensing and Control
1

Conference

ConferenceConference Proceeding - 2004 IEEE International Conference on Networking, Sensing and Control
國家/地區Taiwan
城市Taipei
期間21/03/0423/03/04

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