Formation and structural characterization of cobalt titanate thin films

Shiow Huey Chuang*, Reui Hong Gao, Kuo Hsing Gao, Michael Y. Chiang, Tien-Sheng Chao


研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)


This research successfully produces high quality cobalt titanate (CoTiO3) thin films, a high-k material for gate dielectrics, on SiO2/Si(100) substrates via a spin-coating method with a sol-like precursor solution. This study prepares the precursor solution by reactions of cobalt acetate and titanium isopropoxide in 2-methoxyethanol. The current work obtains CoTiO3 thin films after spin coating followed by post-treatment with air under 550∼650 °C. A scanning electron microscope, determines film thickness and morphology and X-ray diffraction identifies material structures. This study uses X-ray photoelectron spectroscopy to analyze both elemental compositions and chemical bonding characters of the thin films. This work also investigates reaction pathways.

頁(從 - 到)1022-1026
期刊Journal of the Chinese Chemical Society
發行號5 A
出版狀態Published - 1 1月 2010


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