摘要
This letter proposes a novel high bit density nonvolatile memory using a logic compatible flexible amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistor (TFT) structure fabricated at low temperature. Before electrical forming, the a-IGZO TFT exhibits excellent transistor performance, including an ON/OFF current ratio of 8.8\times 106, a steep subthreshold slope of 0.14 V/decade, a threshold voltage of 0.55 V, and a maximum field-effect mobility of 2 cm2/Vs. After electrical forming, a three-bit-per-cell resistive switching memory is realized using localized multilevel resistance states at the drain and source bits. Combining dual functionalities to achieve low-cost integration and excellent device characteristics at bending states, the proposed device is promising for future system-on-plastic applications.
原文 | English |
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文章編號 | 6595599 |
頁(從 - 到) | 1265-1267 |
頁數 | 3 |
期刊 | IEEE Electron Device Letters |
卷 | 34 |
發行號 | 10 |
DOIs | |
出版狀態 | Published - 10月 2013 |