Flexible electret energy harvesters with parylene electret on PDMS substrates

Currently, most vibrational energy harvesters have rigid and resonant structures to harvest energy from periodic motions in specific directions. However, in some situations the motion is random and aperiodic; or the targeted energy source is the strain energy in deformation, rather than the kinetic energy in vibration. Therefore we propose and demonstrate a PDMS-based flexible energy harvester with parylene-C electret that can be attached to any deformable surfaces to harvest the stain energy caused by external deformation. The proposed flexible harvester was fabricated and characterized. The measured power at 20 Hz is 0.18 μW and 82 nW in the compression and bending modes, respectively. Such a harvester has the potential for wearable and implantable electronics applications.