First Demonstration of Interface-Enhanced SAF Enabling 400oC-Robust 42 nm p-SOT-MTJ Cells with STT-Assisted Field-Free Switching and Composite Channels

Ya Jui Tsou, Kai Shin Li, Jia Min Shieh*, Wei Jen Chen, Hsiu Chih Chen, Yi Ju Chen, Cho Lun Hsu, Yao Min Huang, Fu Kuo Hsueh, Wen Hsien Huang, Wen Kuan Yeh, Huan Chi Shih, Pan Chun Liu, C. W. Liu, Yu Shen Yen, Chih Huang Lai, Jeng Hua Wei, Denny D. Tang, Jack Yuan Chen Sun

*此作品的通信作者

研究成果: Conference contribution同行評審

9 引文 斯高帕斯(Scopus)

摘要

CMOS compatible 400oC-robust 42 nm perpendicular spin-orbit torque magnetic tunnel junction (p-SOT-MTJ) devices with the tunnel magnetoresistance (TMR) ratio of 130% is demonstrated for the first time by the interface-enhanced synthetic anti-ferromagnet (SAF) and the improved ion-beam etching (IBE). The record high 440oC thermal robustness of SAF is achieved. The SAF field (HSAF) and the magnetic coupling between Co/Pt multilayer (ML) and reference layer are enhanced by the magnet-coupling fcc-texture multilayer (MCFTM) buffer. The Pt-Fe inter-diffusion during thermal stress is effectively reduced by the W(3Å)-based texture-decoupling diffusion multi-barrier (TDDMB) for magnetic field immunity. The composite SOT channel of TaN/W and Ta/W breaks the thickness limitation of β-W (< ~5 nm) and enlarges the MTJ etching window. The TaN/W channel exhibits the large effective spin Hall angle of ~ -0.27. The deterministic field-free SOT writing with spin-transfer torque (STT) assist is achieved. The size dependence on STT-assisted SOT switching is investigated using micromagnetic simulation.

原文English
主出版物標題2021 Symposium on VLSI Technology, VLSI Technology 2021
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9784863487802
出版狀態Published - 2021
事件41st Symposium on VLSI Technology, VLSI Technology 2021 - Virtual, Online, Japan
持續時間: 13 6月 202119 6月 2021

出版系列

名字Digest of Technical Papers - Symposium on VLSI Technology
2021-June
ISSN(列印)0743-1562

Conference

Conference41st Symposium on VLSI Technology, VLSI Technology 2021
國家/地區Japan
城市Virtual, Online
期間13/06/2119/06/21

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