FILM STRESS IN Pd//2Si LAYERS OF VARYING THICKNESS.

Keyphrases

• Film Stress 100%
• Very Thin Films 100%
• Si Substrate 50%
• Electron Microscopy 50%
• Angstrom 50%
• Double-crystal 50%
• Pd Film 50%
• Radius of Curvature 50%
• Thin Film Thickness 50%
• Technological Applications 50%
• Low Coverage 50%
• Stoney Equation 50%
• X-ray Diffraction Topography 50%
• Film Continuity 50%
• Lang 50%

Engineering

• Thin Films 100%
• Si Substrate 50%
• Stoney Equation 50%
• X-Ray Diffraction Topography 50%

Material Science

• Film 100%
• Thin Films 33%
• X-Ray Diffraction 16%
• Film Thickness 16%
• Electron Microscopy 16%
• Diffraction Topography 16%