Ferroelectricity and Oxide Reliability of Stacked Hafnium–Zirconium Oxide Devices

Ruo Yin Liao, Hsuan Han Chen, Ping Yu Lin, Ting An Liang, Kuan Hung Su, I. Cheng Lin, Chen Hao Wen, Wu Ching Chou, Hsiao Hsuan Hsu*, Chun Hu Cheng*

*此作品的通信作者

研究成果: Article同行評審

指紋

深入研究「Ferroelectricity and Oxide Reliability of Stacked Hafnium–Zirconium Oxide Devices」主題。共同形成了獨特的指紋。

Keyphrases

Engineering

Material Science