@inproceedings{cb01c4fc19484e8190a9fe59801f2d79,
title = "Ferroelectric HfO2 capacitors for varactor application in GHz",
abstract = "Capacitance measurements of a ferroelectric Y-doped HfO2 film at 1 GHz are performed. By applying a bias voltage within the non-switching region of the ferroelectric film, the change in the capacitance has been confirmed. The results suggest the feasibility of ferroelectric HfO2 films for varactor application in high frequency region.",
author = "Lin, {Y. W.} and K. Mizutani and T. Hoshii and H. Wakabayashi and K. Tsutsui and Tsao, {Y. F.} and Huang, {T. J.} and Hsu, {H. T.} and K. Kakushima",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society; Pacific Rim Meeting on Electrochemical and Solid State Science 2020, PRiME 200 ; Conference date: 04-10-2020 Through 09-10-2020",
year = "2020",
doi = "10.1149/09803.0071ecst",
language = "English",
series = "ECS Transactions",
publisher = "IOP Publishing Ltd.",
number = "3",
pages = "71--76",
editor = "D. Misra and {De Gendt}, S. and K. Kita and K. Kakushima and P. Mascher and U. Cvelbar and F. Roozeboom and Hunter, {G. W.} and Li, {L. J.} and C. O'Dwyer",
booktitle = "PRiME 2020",
address = "英國",
edition = "3",
}