Fast-IV measurement investigation of the role of TiN gate nitrogen concentration on bulk traps in HfO2 layer in p-MOSFETs
- Ying Hsin Lu
- , Ting Chang Chang
- , Jih Chien Liao
- , Li Hui Chen
- , Yu Shan Lin
- , Ching En Chen
- , Kuan Ju Liu
- , Xi Wen Liu
- , Chien Yu Lin
- , Chen Hsin Lien
- , Tseung-Yuen Tseng
- , Osbert Cheng
- , Cheng Tung Huang
- , Wei Ting Yen
研究成果: Article › 同行評審
6
引文
斯高帕斯（Scopus）