Fabrication of Vertically Stacked Nanosheet Junctionless Field-Effect Transistors and Applications for the CMOS and CFET Inverters

Po-Jung Sung, Shu-Wei Chang, Kuo-Hsing Kao, Chien-Ting Wu, Chun-Jung Su, Ta-Chun Cho, Fu-Kuo Hsueh, Wen-Hsi Lee, Yao-Jen Lee*, Tien-Sheng Chao

*此作品的通信作者

研究成果: Article同行評審

31 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds