Fabrication of tri-gated junctionless poly-Si transistors with I-line based lithography

Cheng I. Lin, Ko Hui Lee, Horng-Chih Lin*, Tiao Yuan Huang

*此作品的通信作者

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Chemical Engineering

Material Science