Fabrication of Large-Scale High-Mobility Flexible Transparent Zinc Oxide Single Crystal Wafers

Yi Cheng Chen, Yu Hao Tu, Li Wei Chen, Yu Hong Lai, Meng Fu Tsai, Ying Xiu Lin, Hou Chou Lai, Ching Yu Chiang, Heng Jui Liu, Hsin Che Pan, Tzu Yi Yang, Dawei Zhang, Jan Seidel, Jyh Ming Wu, Yu Lun Chueh, Wen-Hao Chang, Ching Shun Ku, Shih Hsun Chen, Li Chang, Ying Hao Chu*

*此作品的通信作者

    研究成果: Article同行評審

    摘要

    Single crystal wafers, such as silicon, are the fundamental carriers of advanced electronic devices. However, these wafers exhibit rigidity without mechanical flexibility, limiting their applications in flexible electronics. Here, we propose a new approach to fabricate 1.5 in. flexible functional zinc oxide (ZnO) single crystal wafers with high electron mobility (>100 cm2 V-1 s-1) and optical transparency (>80%) by a combination of thin-film deposition, a chemical solution method, and surficial treatment. The uniformity of the flexible single crystal wafers is examined by an advanced scanning X-ray diffraction technique and photoluminescence spectroscopy. The transport properties of ZnO flexible single crystal wafers retain their pristine states under various bending conditions, including cyclability and endurability. This approach demonstrates a breakthrough in the fabrication of the flexible single crystal wafers for future flexible optoelectronic applications.

    原文English
    期刊ACS Applied Materials and Interfaces
    DOIs
    出版狀態Accepted/In press - 2021

    指紋

    深入研究「Fabrication of Large-Scale High-Mobility Flexible Transparent Zinc Oxide Single Crystal Wafers」主題。共同形成了獨特的指紋。

    引用此