Fabrication of Biodegradable Soft Tissue-Mimicked Microelectrode Arrays for Implanted Neural Interfacing

Wei Chen Huang*, Wan Lou Lei, Chih Wei Peng

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

This paper reports a method to fabricate biodegradable, adhesive and soft tissue-compliant microelectrode arrays (MEAs). MEAs composed of polylactic acid (PLA) biodegradable insulation layers and Pt/PLA hybrid electrodes can be fabricated in a batch by photolithography with a tunable photoresist/developer composition. The coordinated sacrificial layer dissolution and interfacial adhesion driven by an adhesive hydrogel enable directly transfer printing Pt-PLA MEAs stacks. This integrated process will allow, for first time, the batch production of implanted hydrogel MEAs composed of metal/organic composites as conformal electrodes and fully biodegradable insulation layers to show significantly lower impedance (0.1-2.5 kΩ) at 1 kHz as compared with those reported from most literatures. This device enables the success of both in-vivo site-specific neural stimulation and recording.

原文English
主出版物標題2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
發行者Institute of Electrical and Electronics Engineers Inc.
頁面392-395
頁數4
ISBN(電子)9781665493086
DOIs
出版狀態Published - 2023
事件36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 - Munich, Germany
持續時間: 15 1月 202319 1月 2023

出版系列

名字Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2023-January
ISSN(列印)1084-6999

Conference

Conference36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
國家/地區Germany
城市Munich
期間15/01/2319/01/23

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