Fabrication of a polymer-based torsional vertical comb drive using a double-side partial exposure method

Engineering

• Experimental Result 100%
• Photoresist 100%
• Simulated Result 100%
• Back Side 100%
• Front Side 100%
• Metal Layer 100%
• Dynamic Response 100%
• Polynomial Order 100%
• Fitting Curve 100%
• Fabrication Method 100%
• Rotation Angle 100%
• Etching Process 100%
• Voltage Driving 100%
• Angles of Rotation 100%
• Structural Materials 100%
• Static Deflection 100%
• Plate Torsion 100%
• Finite Element Analysis 100%
• Electrical Conductivity 100%

Keyphrases

• Vertical Comb Drive 100%
• Double-sided 100%
• Exposure Method 100%
• Polymer-based 100%
• Partial Exposure 100%
• Capacitance 75%
• Rotation Angle 50%
• Sputtering System 25%
• Sacrificial Layer 25%
• Front Surface 25%
• Polynomial Degree 25%
• Fabrication Methods 25%
• Driving Voltage 25%
• Finite Element Method 25%
• Dynamic Response 25%
• Etching Process 25%
• Metal Layer 25%
• Torsion 25%
• Polynomial Curve Fitting 25%
• Self-alignment 25%
• Electric Conductivity 25%
• Structural Surface 25%
• Thick Photoresist 25%
• Torsion Spring 25%
• Static-dynamic 25%
• Finger Position 25%
• Structural Materials 25%
• Finger Displacement 25%
• Sacrificial Etching 25%
• Static Deflection 25%
• Deflection Response 25%