Fabrication of 3D quantum dot array by fusion of bio-template and neutral beam etching I: Basic technologies

Keyphrases

• Surface Roughness 100%
• High Density 100%
• GaAs Substrate 100%
• Ferritin 100%
• Quantum Dot Arrays 100%
• Surface Oxide 100%
• Neutral Beam 100%
• Neutral Beam Etching 100%
• 2D Array 100%
• Biotemplate 100%
• Shell Proteins 100%
• Low Temperature 50%
• Si Substrate 50%
• Gallium Arsenide 50%
• Novel Solutions 50%
• Gas Mixture 50%
• RF Bias 50%
• Iron Oxide 50%
• 3D Arrays 50%
• Argon Gas 50%
• Two-dimensional Array 50%
• Atomic Level 50%
• O Radical 50%
• Chlorine 50%
• Oxidation Method 50%
• Uniform Density 50%
• Oxidation Mechanism 50%
• Level Surface 50%
• Hydrophilic Surface 50%
• Bias Power 50%
• Oxide Removal 50%
• Packing Density 50%
• Ferritin Protein 50%
• Surface Oxidation 50%
• GaAs Nanostructures 50%
• Iron Core 50%
• Surface Hydrophobicity 50%
• Direct Formation 50%
• Taper Angle 50%
• Negative zeta Potential 50%
• Vertical Taper 50%
• Core Removal 50%

Engineering

• Gallium Arsenide 100%
• Quantum Dot 100%
• Gaas Substrate 100%
• Surface Oxide 100%
• Thin Films 50%
• Si Substrate 50%
• Low-Temperature 50%
• Two Dimensional 50%
• Nanomaterial 50%
• 3d Array 50%
• Dimensional Array 50%
• Hydrophilic Surface 50%
• Zeta Potential 50%
• Iron Core 50%
• Surface Hydrophilicity 50%
• Taper Angle 50%
• Gas Mixture 50%

Material Science

• Density 100%
• Gallium Arsenide 100%
• Quantum Dot 100%
• Oxidation Reaction 75%
• Surface (Surface Science) 75%
• Surface Roughness 50%
• Oxide Surface 50%
• Thin Films 25%
• Iron Oxide 25%
• Nanostructure 25%
• Gas Mixture 25%