Fabrication and field-emission characteristics of TiN nanorods with a concave top surface

Te Ming Chen*, Jui Yi Hung, Fu-Ming Pan, Li Chang, Jeng-Tzong Sheu, Shich Chuan Wu

*此作品的通信作者

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

Well-ordered titanium nitride nanorods were fabricated by reactive ion etch using titanium oxide nanodots as the mask, which were prepared using the anodic aluminum oxide templation method. The TiN nanorods exhibited a concave top surface with a protruding edge. Due to the protruding top edge and a high aspect ratio, the TiN nanorods showed a low turn-on voltage of 1.6 Vμm. The ellipsoidal cylinder model was used to evaluate the field-enhancement effect of the protruding edge, and an underestimation by ∼26% was found as compared with the enhancement factor derived from the Fowler-Nordheim plot.

原文English
頁(從 - 到)K40-K43
頁數4
期刊Electrochemical and Solid-State Letters
11
發行號4
DOIs
出版狀態Published - 1月 2008

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