Fabrication and Characterizations of PbZrxTi1-xO3(PZT) Ultrasonic Sensing Chips

Ming Ling Lee, Shih Ming Chen, Jia Jie Jhang, Lin Sin Lu, Shu Ting Yang, Pin En Chiu, Yu Sheng Tsai, Yewchung Sermon Wu, Chin Chi Cheng, Hsiang Chen*, Jung Han


研究成果: Article同行評審


PbZrxTi1-xO3 (PZT) ultrasonic sensing chips were fabricated by ball milling, electrical discharge and spraying on iron sheets. Various PZT growth conditions, including the thickness of the iron sheet and the coating layers, were investigated. Ultrasonic sensing measurements indicated that PZT chips of sufficient thickness and with 6 or 9 coating layers exhibited ultrasonic sensing capability. Further, multiple material and electrical characterizations revealed that while sufficient thickness and low leakage were required, uniform growth of the film and a grain size of approximately 150 nm were preferable for ultrasonic sensing. Their compact size, rapid response, and low cost make PZT-based ultrasonic sensors promising for future ultrasonic detection application.

頁(從 - 到)32453-32460
期刊IEEE Access
出版狀態Published - 2022


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