Fabrication and Characterizations of PbZrxTi1-xO3(PZT) Ultrasonic Sensing Chips

Ming Ling Lee; Shih Ming Chen; Jia Jie Jhang; Lin Sin Lu; Shu Ting Yang; Pin En Chiu; Yu Sheng Tsai; Yewchung Sermon Wu; Chin Chi Cheng; Hsiang Chen; Jung Han

doi:10.1109/ACCESS.2022.3158740

Fabrication and Characterizations of PbZr_xTi_1-xO₃(PZT) Ultrasonic Sensing Chips

Ming Ling Lee, Shih Ming Chen, Jia Jie Jhang, Lin Sin Lu, Shu Ting Yang, Pin En Chiu, Yu Sheng Tsai, Yewchung Sermon Wu, Chin Chi Cheng, Hsiang Chen^*, Jung Han

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研究成果: Article › 同行評審

摘要

PbZrxTi1-xO3 (PZT) ultrasonic sensing chips were fabricated by ball milling, electrical discharge and spraying on iron sheets. Various PZT growth conditions, including the thickness of the iron sheet and the coating layers, were investigated. Ultrasonic sensing measurements indicated that PZT chips of sufficient thickness and with 6 or 9 coating layers exhibited ultrasonic sensing capability. Further, multiple material and electrical characterizations revealed that while sufficient thickness and low leakage were required, uniform growth of the film and a grain size of approximately 150 nm were preferable for ultrasonic sensing. Their compact size, rapid response, and low cost make PZT-based ultrasonic sensors promising for future ultrasonic detection application.

原文	English
頁（從 - 到）	32453-32460
頁數	8
期刊	IEEE Access
卷	10
DOIs	https://doi.org/10.1109/ACCESS.2022.3158740
出版狀態	Published - 2022

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10.1109/ACCESS.2022.3158740

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title = "Fabrication and Characterizations of PbZrxTi1-xO3(PZT) Ultrasonic Sensing Chips",

abstract = "PbZrxTi1-xO3 (PZT) ultrasonic sensing chips were fabricated by ball milling, electrical discharge and spraying on iron sheets. Various PZT growth conditions, including the thickness of the iron sheet and the coating layers, were investigated. Ultrasonic sensing measurements indicated that PZT chips of sufficient thickness and with 6 or 9 coating layers exhibited ultrasonic sensing capability. Further, multiple material and electrical characterizations revealed that while sufficient thickness and low leakage were required, uniform growth of the film and a grain size of approximately 150 nm were preferable for ultrasonic sensing. Their compact size, rapid response, and low cost make PZT-based ultrasonic sensors promising for future ultrasonic detection application.",

keywords = "PbZrTiO, grain size, iron sheet, morphology, ultrasonic sensor",

author = "Lee, {Ming Ling} and Chen, {Shih Ming} and Jhang, {Jia Jie} and Lu, {Lin Sin} and Yang, {Shu Ting} and Chiu, {Pin En} and Tsai, {Yu Sheng} and Wu, {Yewchung Sermon} and Cheng, {Chin Chi} and Hsiang Chen and Jung Han",

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year = "2022",

doi = "10.1109/ACCESS.2022.3158740",

language = "English",

volume = "10",

pages = "32453--32460",

journal = "IEEE Access",

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AU - Lee, Ming Ling

AU - Chen, Shih Ming

AU - Jhang, Jia Jie

AU - Lu, Lin Sin

AU - Yang, Shu Ting

AU - Chiu, Pin En

AU - Tsai, Yu Sheng

AU - Wu, Yewchung Sermon

AU - Cheng, Chin Chi

AU - Chen, Hsiang

AU - Han, Jung

PY - 2022

Y1 - 2022

N2 - PbZrxTi1-xO3 (PZT) ultrasonic sensing chips were fabricated by ball milling, electrical discharge and spraying on iron sheets. Various PZT growth conditions, including the thickness of the iron sheet and the coating layers, were investigated. Ultrasonic sensing measurements indicated that PZT chips of sufficient thickness and with 6 or 9 coating layers exhibited ultrasonic sensing capability. Further, multiple material and electrical characterizations revealed that while sufficient thickness and low leakage were required, uniform growth of the film and a grain size of approximately 150 nm were preferable for ultrasonic sensing. Their compact size, rapid response, and low cost make PZT-based ultrasonic sensors promising for future ultrasonic detection application.

AB - PbZrxTi1-xO3 (PZT) ultrasonic sensing chips were fabricated by ball milling, electrical discharge and spraying on iron sheets. Various PZT growth conditions, including the thickness of the iron sheet and the coating layers, were investigated. Ultrasonic sensing measurements indicated that PZT chips of sufficient thickness and with 6 or 9 coating layers exhibited ultrasonic sensing capability. Further, multiple material and electrical characterizations revealed that while sufficient thickness and low leakage were required, uniform growth of the film and a grain size of approximately 150 nm were preferable for ultrasonic sensing. Their compact size, rapid response, and low cost make PZT-based ultrasonic sensors promising for future ultrasonic detection application.

KW - PbZrTiO

KW - grain size

KW - iron sheet

KW - morphology

KW - ultrasonic sensor

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JO - IEEE Access

JF - IEEE Access

ER -

Fabrication and Characterizations of PbZrxTi1-xO3(PZT) Ultrasonic Sensing Chips

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Fabrication and Characterizations of PbZr_xTi_1-xO₃(PZT) Ultrasonic Sensing Chips