Fabrication and characterization of surface CMUT with a bossed membrane

Wang Mengli*, Chen Jingkuang, Cheng Xiaoyang, Li Chuan, Liu Xueyuan

*此作品的通信作者

研究成果: Conference article同行評審

4 引文 斯高帕斯(Scopus)

摘要

This paper describes the fabrication and characterization of surface-micromachined capacitive ultrasonic transducers with a bossed membrane. The boss was formed using 3μm thick deposited tetraethoxysilane (TEOS) oxide on top of a suspended polysilicon membrane. This same oxide layer was also used to seal the release holes along the peripheral of the polysilicon membrane. No extra mask or processing step in addition to that used for fabricating planar-membrane capacitive micromachined ultrasonic transducer (CMUT) is needed for the addition of a boss on the polysilicon membrane. It was found from device characterization that a bossed device shifted the center frequency to a higher value, improved the fractional bandwidth in transmission mode, increased the receiver sensitivity, and augmented the electromechanical coupling efficiency compared to their planar-membrane counterpart with the same membrane diameter.

原文English
文章編號4803574
頁(從 - 到)394-397
頁數4
期刊Proceedings of the IEEE Ultrasonics Symposium
DOIs
出版狀態Published - 2008
事件2008 IEEE International Ultrasonics Symposium, IUS 2008 - Beijing, China
持續時間: 2 11月 20085 11月 2008

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