Experimentally effective clean process to C-V characteristic variation reduction of HKMG MOS devices

Chien Hung Chen, Yiming Li, Chieh Yang Chen, Yu Yu Chen, Sheng Chia Hsu, Wen Tsung Huang, Sheng Yuan Chu

研究成果: Conference contribution同行評審

指紋

深入研究「Experimentally effective clean process to C-V characteristic variation reduction of HKMG MOS devices」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy