ESD protection design on T/R switch with embedded SCR in CMOS process

Tao Yi Hung, Ming-Dou Ker

研究成果: Conference contribution同行評審

4 引文 斯高帕斯(Scopus)

摘要

ESD protection design for the RF transmit/receive switch (T/R switch) with embedded silicon-controlled rectifier (SCR) is proposed, where the SCR device is embedded in the ESD diode and the transistors of T/R switch by layout skill. Silicon chip verified in a 90-nm CMOS process has been measured by TLP and HBM ESD test to confirm its efficiency for ESD protection. The parasitic capacitance from the ESD devices was also measured. Failure analysis by SEM was performed to find the burned-out site on the T/R switch with the proposed design. From the failure analysis SEM pictures, the embedded SCR in the proposed design is actually triggered on to discharge ESD current.

原文English
主出版物標題24th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2017
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1-6
頁數6
ISBN(電子)9781538617793
DOIs
出版狀態Published - 5 10月 2017
事件24th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2017 - Chengdu, China
持續時間: 4 7月 20177 7月 2017

出版系列

名字Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
2017-July

Conference

Conference24th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2017
國家/地區China
城市Chengdu
期間4/07/177/07/17

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