Erratum: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))

T. C. Chang; S. T. Yan; Po-Tsun Liu; Z. W. Lin; H. Aoki; S. M. Sze

doi:10.1016/j.tsf.2004.05.002

Erratum: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))

T. C. Chang^*, S. T. Yan, Po-Tsun Liu, Z. W. Lin, H. Aoki, S. M. Sze

^*此作品的通信作者

光電工程學系

研究成果: Comment/debate

原文	English
頁（從 - 到）	342-342
頁數	1
期刊	Thin Solid Films
卷	467
發行號	1-2
DOIs	https://doi.org/10.1016/j.tsf.2004.05.002
出版狀態	Published - 22 11月 2004

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10.1016/j.tsf.2004.05.002

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引用此

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author = "Chang, \{T. C.\} and Yan, \{S. T.\} and Po-Tsun Liu and Lin, \{Z. W.\} and H. Aoki and Sze, \{S. M.\}",

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AU - Chang, T. C.

AU - Yan, S. T.

AU - Liu, Po-Tsun

AU - Lin, Z. W.

AU - Aoki, H.

AU - Sze, S. M.

PY - 2004/11/22

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M3 - Comment/debate

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EP - 342

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

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