Epitaxial germanium on soi substrate and its application of fabricating high i on IOFF ratio Ge FinFETs

Cheng Ting Chung, Che Wei Chen, Jyun Chih Lin, Che Chen Wu, Chao-Hsin Chien, Guang Li Luo, Chi Chung Kei, Chien Nan Hsiao

研究成果: Article同行評審

11 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds