Enhancing the performance of germanium channel nMOSFET using phosphorus dopant segregation

Che Wei Chen, Ju Yuan Tzeng, Cheng Ting Chung, Hung Pin Chien, Chao-Hsin Chien, Guang Li Luo, Pei Yu Wang, Bing-Yue Tsui

研究成果: Article同行評審

14 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Material Science