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Enhancing the effectiveness of output projection in wafer fabrication using an Industry 4.0 and XAI approach
Tin Chih Toly Chen
, Yu Cheng Wang
*
, Chi Wei Lin
*
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工業工程與管理學系
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Keyphrases
Wafer Fabrication
100%
Industry 4.0 (I4.0)
100%
Proposed Methodology
50%
Deep Learning
50%
Deep Neural Network
50%
Wafer
25%
Deep Learning Methods
25%
Wafer Fab
25%
Random Forest
25%
Deep Learning Applications
25%
Real-time Jobs
25%
Explainable Artificial Intelligence
25%
Local Explanations
25%
XAI Technique
25%
SHAP Analysis
25%
Industry 4.0 Technologies
25%
Real-time Factory
25%
Projection Mechanism
25%
Engineering
Deep Learning Method
100%
Deep Neural Network
50%
Decision Rule
25%
Random Forest
25%
Artificial Intelligence
25%
Earth and Planetary Sciences
Real Time
100%
Artificial Intelligence
100%
Chemical Engineering
Deep Learning Method
100%
Deep Neural Network
50%
Artificial Intelligence
25%
Economics, Econometrics and Finance
Industry
100%