Enhancement of performance and storage stability of thin-film transistor with InZnSnO/InGaZnO bilayer stack channel layers

Xiu Yun Yeh, Chur Shyang Fuh, Po-Tsun Liu*, Chih Hsiang Chang, Che Chia Chang, Yun Chu Tsai

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

We investigated on electrical performance and storage issues of high efficiency amorphous In-Sn-Zn-O (IZTO) thin film transistor. By capping additional In-Ga-Zn-O (IGZO) layer on IZTO to form the bilayer channel, the device's performance could obviously enhance. The mobility of devices without and with 20 nm, 40 nm IGZO capping layer was 24.2 cm 2 /Vs, 29.1 cm 2 /Vs and 33.1 cmVVs, respectively. The threshold voltage and substrate swing were improved proportionally with the thickness of IGZO capping layer. In addition, the storage issues of devices could also be eliminated by using the bilayer channel structure without any threshold voltage shift after placing in ambient environment for half month. Owning to the high performance and better storage stability, the TFTs with IZTO/IGZO bilayer channel is promising for next-generation AMOLEDs displays application.

原文English
主出版物標題21st International Display Workshops 2014, IDW 2014
發行者Society for Information Display
頁面292-294
頁數3
ISBN(電子)9781510827790
出版狀態Published - 1 1月 2014
事件21st International Display Workshops 2014, IDW 2014 - Niigata, Japan
持續時間: 3 12月 20145 12月 2014

出版系列

名字21st International Display Workshops 2014, IDW 2014
1

Conference

Conference21st International Display Workshops 2014, IDW 2014
國家/地區Japan
城市Niigata
期間3/12/145/12/14

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