Enhanced reliability and uniformity for Ge pMOSFET with low temperature supercritical fluid treatment

Dun Bao Ruan, Kuei Shu Chang-Liao*, Ji Syuan Li, Bo Lien Kuo, Zi Qin Hong, Guan Ting Liu, Po Tsun Liu

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy