Enhanced Performance for SiGe/Si Gate-All-Around Field-Effect-Transistor with Ge Condensation Using Supercritical Fluid Treatment

Wei Ren Chen, Dun Bao Ruan, Kuei Shu Chang-Liao*, Hao Yan Wang, Guang Li Luo, Yu Chuan Chiu, Ting Kai Kuan, Po Tsun Liu

*此作品的通信作者

研究成果: Conference contribution同行評審

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Engineering & Materials Science

Chemical Compounds