Enhanced Electrical Characteristics of Ge nMOSFET by Supercritical Fluid CO2Treatment with H2O2Cosolvent

Dun Bao Ruan, Kuei Shu Chang-Liao*, Guan Ting Liu, Yu Chuan Chiu, Kai Jhih Gan, Po Tsun Liu

*此作品的通信作者

研究成果: Article同行評審

8 引文 斯高帕斯(Scopus)

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Chemical Compounds

Engineering & Materials Science