Energy control of neutral oxygen particles passing through an aperture electrode

Takeo Ohno*, Daiki Nakayama, Takeru Okada, Seiji Samukawa

*此作品的通信作者

研究成果: Article同行評審

11 引文 斯高帕斯(Scopus)

摘要

The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber.

原文English
頁(從 - 到)169-171
頁數3
期刊Results in Physics
8
DOIs
出版狀態Published - 3月 2018

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