@article{80ddf4eca38547b6a65c3001b6bd6324,
title = "Energy control of neutral oxygen particles passing through an aperture electrode",
abstract = "The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber.",
keywords = "Beam energy, Neutralized plasma particle, Oxygen plasma",
author = "Takeo Ohno and Daiki Nakayama and Takeru Okada and Seiji Samukawa",
note = "Publisher Copyright: {\textcopyright} 2017 The Authors",
year = "2018",
month = mar,
doi = "10.1016/j.rinp.2017.12.001",
language = "English",
volume = "8",
pages = "169--171",
journal = "Results in Physics",
issn = "2211-3797",
publisher = "Elsevier B.V.",
}